Hitachi S-570 with IXRF EDS
This Hitachi SEM S-570 is currently installed and used as a backup. It basically has the same resolution as the Hitachi 3700 which is a current model. It has IXRF EDS software 1.4D which is current. The IXRF interface box to the SEM allows digitizing of all images coming from the SEM. The IXRF software will allow connection to various detectors as long as the proper interface cables are used. It has two rebuilt roughing pumps and a third Hitachi for backup. We had a sample port installed and allows the sample to enter without allowing air into the vacuum chamber. Switch time is a couple minutes. The unit is a LaB6 and kept under constant vacuum using an ion pump at 5kV. This typically is 10-6 torr . We also have an extra Wehnelt assembly with filament installed in case the filament blows. We also have a backscatter unit installed. We have all the manuals to the equipment installed on this unit. There is also a fluid cooler on the bottom of the column and run by a second independent unit. There are two scintillators, an upper and lower. The resolution on the EDS SiLi detector is 138ev. This was rebuilt. We have a parts and circuit manuals. We have a high voltage tester for measuring current. We recommend a Hitachi service rep for dismantling and preparing for move.